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ELENG C246

Parametric and Optimal Design of MEMS

3 credits · Graduate

Parametric design and optimal design of MEMS. Emphasis on design, not fabrication. Analytic solution of MEMS design problems to determine the dimensions of MEMS structures for specified function. Trade-off of various performance requirements despite conflicting design requirements. Structures include flexure systems, accelerometers, and rate sensors.

Prerequisites & course information

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Sources