Electronic Materials Processing

Topics

• To provide an introduction into the principles of thin film processing and related technologies. To present the relevant materials science issues in semiconductor and oxide processing To prepare students a) for work in semiconductor processing facilities and b) for graduate studies related to thin film processing and relevant materials science topics.
• To understand the concepts of bands, bandgap, to distinguish direct and indirect bandgap semiconductors. Understanding of free electron and hole doping of semiconductors to determine Fermi level position. Knowledge of the formation of p-n junction to explain the diode operation and its I-V characteristics. Understanding of the mechanisms of Hall Effect, transport, and C-V measurements, so that can calculate carrier concentration, mobility and conductivity given raw experimental data. Knowledge of electrical and optical properties of thin films. Basic knowledge of gas kinetics and vacuum technology, including ideal gas, gas transport theory, definition, creation and measurement of vacuum. The ability to describe major growth techniques of bulk, thin film, and nanostructured semiconductors, with particular emphasis on thin film deposition technologies, including evaporation, sputtering, chemical vapor deposition and epitaxial growths. To understand the effect of defects in semiconductors, so that can describe their electronic and optical behaviors, and the methods to eliminate and control them in semiconductors. To have basic knowledge of doping, purification, oxidation, gettering, diffusion, implantation, metallization, lithography and etching in semiconductor processing. To have basic knowledge of electronic material characterization methods: x-ray diffraction, SEM and TEM, EDX, Auger, STM and AFM, Rutherford Back Scattering and SIMS, as well as optical methods including photoluminescence, absorption and Raman scattering.

Official catalogue course objectives and student learning outcomes