Introduction to Micro/Nano Mechanical Systems Laboratory
This hands-on laboratory course focuses on the mechanical engineering principles that underlie the design, fabricaton, and operation of micro/nanoscale mechanical systems, including devices made by nanowire/nanotube syntheses; photolithography/soft lithography; and molding processes. Each laboratory will have different focuses for basic understanding of MEMS/NEMS systems from prototype constructions to experimental testings using mechanical, electrical, or optical techniques.
Prerequisites & course information
{'preRequisiteCourse': '1154931', 'concurrentPrerequisit': False}; {'preRequisiteCourse': '1184921', 'concurrentPrerequisit': False}; {'preRequisiteCourse': '1155011', 'concurrentPrerequisit': False}; {'preRequisiteCourse': '1155001', 'concurrentPrerequisit': False}; {'preRequisiteCourse': '1063272', 'concurrentPrerequisit': False}; {'preRequisiteCourse': '1578211', 'concurrentPrerequisit': False}
Sources
- Course catalogue ↗2026-2027