Introduction to Microelectromechanical Systems

Topics

• The course aims to provide basic understanding of micromachining processes, including surface micromachining, bulk micromachining and LIGA. Students should learn the design and fabrication aspects of MEMS by using computer-aided-design tools to design and draw their own microstructures.
• Students should be able to design micro-machining process flows by using fundamental skills learned in the class and combine with knowledge from other courses to construct their own micro-machines. Students completing this course will have: The ability to identify, formulate, and solve problems relating to MEMS manufacturing. The ability to identify, formulate, and solve problems relating to MEMS manufacturing. The ability to apply mathematics, basic science, and engineering science to the solution of MEMS manufacturing problems. The ability to design a component and select a fabrication process or sequence of processes suitable for production of a MEMS device. The ability to interpret the results of engineering investigations. ABET: An ability to apply knowledge of mathematics, science, and engineering; an ability to design a system, component, or process to meet desired needs; an ability to identify, formulate, and solve engineering problems. ABET: A recognition of the need for, and an ability to engage in life-long learning; a knowledge of contemporary issues; an ability to use the techniques, skills, and modern engineering tools necessary for engineering practice.

Official catalogue course objectives and student learning outcomes