Properties and Processing of Electronic Materials

Focus on fundamental properties, processing, and characterization of electronic materials for microelectronic, large area, and thin film device applications. Processing Si into modern integrated circuits, e.g., VLSI, USLI, will be described in terms of materials science of unit processes (oxidation, lithography, diffusion, ion implantation, thin film deposition) used in device fabrication. Review relationship between properties of different materials classes (metals, semiconductors, insulators) and band structure. Concepts used to explain the operation of a p-n junction and simple MOS structures. Laboratory will focus on depositing materials via vapor phase synthesis methods and measuring fundamental electronic properties of materials using transport measurements.