Design and Fabrication of Semiconductor Devices

Contemporary practice in the design and fabrication of semiconductor devices. The realization of basic electronic device functions on the semiconductor platform is a central theme in a coordinated lecture and laboratory course. Topics include microcircuit photolithography; layout and design scaling rules for integrated circuits; and techniques in semiconductor and thin film processing as they apply to ULSI circuit manufacturing. Prerequisite: ENGN 1590 or permission.