MicroElectroMechanical Systems (MEMS)

Integrated analysis and design of MicroElectroMechanical Systems (MEMS), which are highly integrated micron-scale devices used in many applications: sensors, energy (engines), optics, bioengineering, chemical processing, etc. Provides an introduction to the science and art of design, fabrication, performance, and use of MEMS in all disciplines of engineering.