Micro/Nano System Design, Fabrication and Integration

3 credits · Graduate Programs

Techniques for the fabrication of micro/nano systems, including ultra-thin films and multilayers. Industry-standard metrology techniques and technologies for characterization of the structure, chemistry and properties of micro/nano materials and devices. Fundamental fabrication technologies including bulk micromachining, surface micromachining and commercial methods. Bonding and packaging issues related to the micro/nano scale. Prerequisite(s): Admission to the PhD in Electrical and Computer Engineering or the MSc in Electrical Engineering. Antirequisite(s): Credit for Electrical Engineering 616 and 619.50 will not be allowed.