EE 109
Introduction to the Micro/Nanofabrication Lab
Introduction to techniques of micro-and nanofabrication, including solid-state, optical, and microfluidic devices. Students will be trained to use fabrication and characterization equipment available in the applied physics micro- and nanofabrication lab. Topics include Schottky diodes, MOS capacitors, light-emitting diodes, microlenses, microfluidic valves and pumps, atomic force microscopy, scanning electron microscopy, and electron-beam writing.
Topics
- Schottky diodes
- MOS capacitors
- light-emitting diodes
- microlenses
- microfluidic valves and pumps
- atomic force microscopy
- scanning electron microscopy
- and electron-beam writing
Topics explicitly listed in official catalogue description
Sources
- Course catalogue ↗2026-2027
- Catalogue entry ↗
Catalogue variants
- Introduction to the Micro/Nanofabrication Lab · 9 units (0-6-3) | first, second, third terms