Chemical Engineering Applied to Microfabrication and Devices

3 Units

Silicon based microfabrication and micromachining require many chemical engineering technologies. Microfabricated devices such as sensors are also directly related to chemical engineering. The applications of chemical engineering principles to microfabrication and micromachining are introduced. Oxidation processing, chemical vapor deposition, etching and patterning techniques, electroplating and other technologies are discussed. Graduate students will submit an additional final project on some technical aspect of microfabrication technology or devices. Recommended preparation: ECHE 363 . Offered as ECHE 383 and ECHE 483 .