Integrated Circuits and Electronic Devices

3 Units

Technology of monolithic integrated circuits and devices, including crystal growth and doping, photolithography, vacuum technology, metalization, wet etching, thin film basics, oxidation, diffusion, ion implantation, epitaxy, chemical vapor deposition, plasma processing, and micromachining. Basics of semiconductor devices including junction diodes, bipolar junction transistors, and field effect transistors. Prereq: PHYS 122 . Prereq or Coreq: MATH 224 .