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ELEC 6231

Design of Integrated Circuit Components

4 credits · Graduate

Winter 2008

Topics

  • High-speed semiconductor devices
  • Film deposition
  • Oxidation
  • Thermal oxidation
  • Photolithography
  • Wet etching

Readings

  • Chapter on high-speed devices; bibliographic details not specified.
    Listed reading
  • Semiconductor-fabrication book chapter and laboratory manual.
    Listed reading
Sources