Complementary Metal-Odide-Semiconductor (CMOS) MicroElectroMechanical Systems (MEMS)

3 credits · Graduate

This course is intended for graduate students in the field of microelectronics and MEMS. In CMOS-MEMS, the combination of the globally established, standard CMOS technology with the commercially promising MEMS and its advantages over a hybrid solution are introduced. Other topics include the fabrication technology, design techniques, material and device characterization and CMOS based MEMS applications. PREREQUISITES: IC design or approval of instructor