Micro-electro-mechanical Systems (MEMS)

3 credits · Graduate

This course deals with micro-machining and MEMS (micro-electro-mechanical systems). The following topics will be covered: scaling issues, fabrication technologies and production methods, classification and analysis of MEMS devices (both sensors and actuators). The integration of multiple devices into systems will be addressed including issues of assembly and interfacing. Micro-machining will be compared and contrasted to both micro-electronics and traditional micro-machining. The development and use of MEMS simulation and design tools will be covered. PREREQUISITES: Approval of instructor.