Micro-Electromechanical Systems and Nanotechnology

[0.50] credits · Graduate

This course offers an introduction to Micro-Electromechanical Systems (MEMS) and nanotechnology, focusing on their fundamental principles, design methodologies, fabrication techniques, and real-world applications. Key topics include the working principles of MEMS and nanoscale systems, microfabrication and micromachining processes, and the selection of materials for MEMS and nanotechnology. Students explore advanced techniques in designing and manufacturing micro- and nano systems, as well as their diverse applications across industries such as healthcare, electronics, and automation. By bridging theory with practical insights, this course equips students with a solid foundation in MEMS and nanotechnology for research and industrial innovation.