Microfabrication Laboratory

Harvard FAS

The course provides introduction to micro- and nano-fabrication processes used to realize photonic, electronic and mechanical devices. Lectures will introduce state-of-the-art semiconductor fabrication processes, including lithography, deposition of metals and dielectrics, etching, oxidation, implantation, and diffusion of dopants. The fabrication component of the course will be carried out in a state-of-the-art cleanroom in the Center for Nanoscale Systems, where students will…