Introduction to Microelectromechanical Systems

Harvard FAS

The goal of this multidisciplinary course is to enable students to learn how to create miniaturized devices. In addition to the weekly lectures, hand-on activities will lead students to become capable of creating micro-nano devices. Students will understand the physics of sensors and actuators, become familiar with thin-film fabrication technologies, and understanding how these concepts were commercialized. Learning is in small teams – together, students design, simulate, build, edit,…