Materials Science of Thin Films

3 Credits.

The processing, structure, and properties of thin films are discussed emphasizing current areas of scientific and technological interest. Topics include elements of vacuum science and technology; chemical and physical vapor deposition processes; film growth and microstructure; chemical and microstructural characterization methods; epitaxy; mechanical properties such as internal stresses, adhesion, and strength; and technological applications such as superlattices, diffusion barriers, and protective coatings. Co-listed with EN.510.657