Microfabrication Laboratory

4 Credits.

This laboratory course is an introduction to the principles of microfabrication for microelectronics, sensors, MEMS, and other synthetic microsystems that have applications in medicine and biology. Course comprises of laboratory work and accompanying lectures that cover silicon oxidation, aluminum evaporation, photoresist deposition, photolithography, plating, etching, packaging, design and analysis CAD tools, and foundry services. Seniors only or Perm. Req’d. Co-listed as EN.580.495 & EN.530.495