CHEMENG 750
Advanced MEMS Fabrication and Microfluidics
2026
Topics
- Microfabrication and micromachining
- Surface and bulk micromachining
- Non-conventional machining
- Microfluidics
- Microchannels
- Microvalves
- Micromixers
- Micropumps
- Droplet actuation
- Integrated Systems
Sources
- Course catalogue โ2026โ2027