ENGPHYS 4Z04
Semiconductor Manufacturing Technology
Fall 2026
Topics
- Detailed description
- Fabrication technologies used
- Semiconductor industry
- Computer modelling of device fabrication process and device performance
- Device fabrication in a cleanroom environment
Readings
- "Silicon VLSI Technology", J D Plummer, M D Deal, and P B Griffin, Prentice-Hall, 2000 (available online at no cost)