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ENGPHYS 729

Thin Film Growth and Deposition

Graduate

Winter 2026

Topics

  • Thin film growth and deposition
  • Thermal evaporation
  • E-beam evaporation
  • Sputtering
  • Chemical vapour deposition and molecular beam epitaxy
  • Thermodynamics and kinetics of film growth

Readings

  • The materials section states none.
    See source
Sources