ENGPHYS 752
Advanced MEMS Fabrication and Microfluidics
2026
Topics
- Micorfabrication and micromachining
- Surface and bulk micromachining
- Nonconventional machining
- Microfluidics
- Microchannels
- Microsvalves
- Micromixers
- Micropumps
- Droplet actuation
- Integrated Systems