Introduction to MEMS

Undergraduate

provides the fundamentals in micro-electro-mechanical systems (MEMS) using examples from industrial MEMS applications. Topics include essential electrical and mechanical concepts for MEMS; fabrication processes for MEMS devices; basic MEMS governing equations in different energy domains (mechanical, electrical and thermal); methods for layout, design and modelling of MEMS devices; simulation techniques; techniques for testing and characterization of MEMS devices; thermal sensing and actuation; surface micro machining; and case studies.