Integrated Microsystems

4 credits · College of Engineering catalogue

Advisory Prerequisite: EECS 414. Enforced Prerequisite: None. (4 credits) Review of interface electronics for sense and drive and their influence on device performance, interface standards, MEMS and circuit noise sources, packaging and assembly techniques, testing and calibration approaches and communication in integrated microsystems. Applications, including RF MEMS, optical MEMS, bioMEMS, and microfluidics. Design project using CAD and report preparation.