Principles of Microelectronics Process Technology

3 credits · College of Engineering catalogue

Advisory Prerequisite: EECS 421 and EECS 423. Enforced Prerequisite: None. (3 credits) Theoretical analysis of the chemistry and physics of process technologies used in micro-electronics fabrication. Topics include: semiconductor growth, material characterization, lithography tools, photo-resist models, thin film deposition, chemical etching, plasma etching, electrical contact formation, micro-structure processing and process modeling.