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EECS 423

Micro/Nano Device Fabrication and Characterization

4 credits · College of Engineering catalogue

Advisory Prerequisite: None. Enforced Prerequisite: Senior or graduate standing. (4 credits) Basic principles and hands-on experience with semiconductor micro/nano-fabrication technologies. Students will perform computer simulations of fabrication steps, and will practice some of the key processing steps used in fabricating different devices in modern IC manufacturing. Students will test and/or analyze electrical properties of various devices and compare results to theory.

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