Integrated Microsystems Laboratory

4 credits · College of Engineering catalogue

Advisory Prerequisite: EECS 311 or EECS 312 or EECS 414 or graduate standing. Enforced Prerequisite: EECS 311 or EECS 312 or EECS 414; No OP/F; or graduate standing. Minimum grade requirement of “C” for enforced prerequisite. (4 credits) Development of a complete integrated microsystem, from functional definition to final test. MEMS-based transducer design and electrical, mechanical and thermal limits. Design of MOS interface circuits. MEMS and MOS chip fabrication. Mask making, pattern transfer, oxidation, ion implantation and metallization. Packaging and testing challenges. Students work in interdisciplinary teams. Projects are overseen/graded by faculty and may also involve mentoring by representatives from external organizations.