Microelectromechanical Systems

3 credits · College of Engineering catalogue

Advisory Prerequisite: Senior or graduate standing. Enforced Prerequisite: None. (3 credits) Provides fundamental knowledge on Microelectromechanical Systems (MEMS) technology and microsystems. The covered topics include: surface micromachined lateral spring design, piezoresistive & capacitive sensors design, micromechanical resonators design, electrostatic & thermal actuators design, BioMEMS and microfluidic devices design, surface/bulk micromachining, and fundamentals of mechanical measurement and electronics.