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12.141

Electron Microprobe Analysis

Undergraduate · Historical course

January IAP 2012

Topics

  • Introduction; electron-specimen interactions; electron detectors; scanning electron imaging (backscattered and secondary electron, BSE and SE); cathodoluminescence (CL) imaging; qualitative analysis using BSE imaging and energy dispersive spectrometry (EDS).
  • X-ray generation, emission, detection and measurement; wavelength dispersive spectrometer (WDS); analyzing crystals and proportional counters; WDS signal processing with single channel analyzer; compositional imaging (X-ray mapping) using WDS.
  • Quantitative analysis using WDS; sample preparation; carbon coating; peak and background in WD spectra; detector settings through pulse height analysis; peak overlap corrections.
  • Matrix (ZAF) corrections in quantitative analysis; φ(ρz) corrections.

Readings

  • LEC #: 1 · TOPICS: Introduction; electron-specimen interactions; electron detectors; scanning electron imaging (backscattered and secondary electron, BSE and SE); cathodoluminescence (CL) imaging; qualitative analysis using BSE imaging and energy dispersive spectrometry (EDS). · READINGS: Course notes, pp. 3–7, 22–25, and 36–37.
    Reading assignment
  • LEC #: 2 · TOPICS: X-ray generation, emission, detection and measurement; wavelength dispersive spectrometer (WDS); analyzing crystals and proportional counters; WDS signal processing with single channel analyzer; compositional imaging (X-ray mapping) using WDS. · READINGS: Course notes, pp. 7–11 and 25–35.
    Reading assignment
  • LEC #: 3 · TOPICS: Quantitative analysis using WDS; sample preparation; carbon coating; peak and background in WD spectra; detector settings through pulse height analysis; peak overlap corrections. · READINGS: Course notes, pp. 36–40.
    Reading assignment
  • LEC #: 4 · TOPICS: Matrix (ZAF) corrections in quantitative analysis; φ(ρz) corrections. · READINGS: Course notes, pp. 12–21.
    Reading assignment
  • Goldstein, J. I., D. E. Newbury, et al. Scanning Electron Microscopy and X-ray Microanalysis . 3rd ed. Kluwer Academic/Plenum Publishers, 2003. ISBN: 9780306472923.
    Recommended
Sources