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2.391

Submicrometer and Nanometer Technology

Graduate · Historical course

Spring 2006

This course surveys techniques to fabricate and analyze submicron and nanometer structures, with applications. Optical and electron microscopy is reviewed. Additional topics that are covered include: surface characterization, preparation, and measurement techniques, resist technology, optical projection, interferometric, X-ray, ion, and electron lithography; Aqueous, ion, and plasma etching techniques; lift-off and electroplating; and ion implantation. Applications in microelectronics, microphotonics, information storage, and nanotechnology will also be explored. Acknowledgements ---------------- The Instructors would like to thank Bob Barsotti, Bryan Cord, and Ben Wunsch for their work on the Atomic Force Microscope video. They would also like to thank Bryan Cord for creating each video.

Readings

  • Feynman, Richard P. “There’s Plenty of Room at the Bottom.” Journal of Microelectromechanical Systems 1 (1992): 60-66.
    Recommended
  • A reprint of Feynman’s original “There’s plenty of room at the bottom” speech, given in 1959. This talk is considered to have been the start of the field of nanotechnology research, although, as you will learn if you read the article by Buck and Shoulders, others had visions that were more realistic, if less grandiose than Feynman’s.
    Recommended
  • Buck, D. A., and K. R. Shoulders. “An Approach to Microminiature Printed Systems.” Eastern Joint Computer Conference (July 1959): 55-59.
    Recommended
  • Heinrich, A. J., C. P. Lutz, J. A. Gupta, and D. M. Eigler. “Molecule Cascades.” Science 298 (2002): 1381-7.
    Recommended
  • Goodberlet, James G. “Patterning Sub-50 nm Features with Near-field Embedded-amplitude Masks.” Applied Physics Letters 81, no. 7 (August 2002).
    Recommended
  • Gerlach, Robert, and M. Utlaut. “Focused Ion Beam Methods of Nanofabrication: Room at the Bottom.” Proceedings of SPIE 4510 (2001).
    Recommended
Sources