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3.155

Micro/Nano Processing Technology

3-4-5 units · Undergraduate

See description under subject 6.2600J. Enrollment limited.

Fall 2005

Topics

  • Overview/Safety/Lab Assignment (MAS)
  • IC Lab - Overview (MAS)
  • Oxidation (MAS)
  • Diffusion (RCOH)
  • IC Lab: Testing (MAS)
  • Diffusion/Implantation (RCOH)
  • MEMS Lab: Overview (MAS)
  • Vacuum System (RCOH)
  • CVD (RCOH)
  • Sputtering (RCOH)
  • Fluids Lab: Overview (MAS)
  • Evaporation (RCOH)
  • MEMS Lab: Testing (MAS)
  • Lithography (MAS)
  • Lithography, Soft Lithography (MAS)
  • Etching (Wet) (RCOH)
  • Etching (Dry) (RCOH)
  • CMOS (MAS)
  • Advanced Silicon Devices (MAS)
  • Fluids Lab: Testing (MAS)
  • Take Home Introduction / Patents (MAS)
  • Take Home Discussion (MAS)
  • Advanced Topics (Guest)
  • Advanced Topics (cont.) (Guest)
  • Analog Devices Fab Tour

Readings

  • Plummer, James, Michael Deal, and Peter Griffin. Silicon VLSI Technology: Fundamentals, Practice, and Modeling . Upper Saddle River, NJ: Prentice Hall, 2000. ISBN: 9780130850379.
    Recommended
  • Campbell, Stephen. The Science and Engineering of Microelectronic Fabrication . 2nd ed. New York, NY: Oxford University Press, 2001. ISBN: 9780195136050.
    Listed reading
  • Wolf, Stanley, and Richard Tauber. Silicon Processing for the VLSI Era . Vol. 1. Sunset Beach, CA: Lattice Press, 1986. ISBN: 9780961672133.
    Listed reading
  • Sze, Simon. VLSI Technology . 2nd ed. New York, NY: McGraw-Hill, 1988. ISBN: 9780070627352.
    Listed reading
  • Ghandi, Sorab. VLSI Fabrication Principles: Silicon and Gallium Arsenide . 2nd ed. New York, NY: Wiley-Interscience, 1994. ISBN: 9780471580058.
    Listed reading
  • Pierret, Robert, and Gerold Neudeck. Modular Series on Solid State Devices . Reading, MA: Addison-Wesley, 1982. ISBN: 9780201052879.
    Listed reading
  • Grove, A. S. Physics and Technology of Semiconductor Devices . New York, NY: Wiley, 1967. ISBN: 9780471329985.
    Listed reading
  • Colclaser, R. A. Microelectronics Processing and Device Design . New York, NY: Wiley, 1980. ISBN: 9780471043393.
    Listed reading
  • Vossen, John, and Werner Kern. Thin Film Processes . Burlington, MA: Academic Press, 1978. ISBN: 9780127282503.
    Listed reading
  • Mayer, James, and Sylvanus Lau. Electronic Materials Science: For Integrated Circuits in Si and GaAs . Upper Saddle River, NJ: Prentice Hall, 1989. ISBN: 9780023781407.
    Listed reading
  • Murarka, Shyam, and Martin Peckerar. Electronic Materials: Science and Technology . Burlington, MA: Academic Press, 1989. ISBN: 9780125111201.
    Listed reading
  • Ohring, Milton. The Materials Science of Thin Films . 2nd ed. Burlington, MA: Academic Press, 2001. ISBN: 9780125249751.
    Listed reading
  • Senturia, Stephen. Microsystem Design . New York, NY: Springer-Verlag, 2004. ISBN: 9780792372462.
    Listed reading
  • Madou, Marc. Fundamentals of Microfabrication: The Science of Miniaturization . 2nd ed. Boca Raton, FL: CRC Press, 2002. ISBN: 9780849308260.
    Listed reading
  • Kovacs, Gregory. Micromachined Transducers Sourcebook . New York, NY: McGraw-Hill, 1998. ISBN: 9780072907223.
    Listed reading
  • May, G. S., and S. Sze. Fundamentals of Semiconductor Fabrication . New York, NY: John Wiley & Sons, Inc., 2003. ISBN: 9780471232797.
    Listed reading
  • Smith, D. L. Thin Film Deposition: Principles and Practice . New York, NY: McGraw-Hill, 1995. ISBN: 9780070585027.
    Listed reading
  • Gopen, and Swan. “The Science of Scientific Writing.” American Scientist 78 (Nov-Dec 1990): 550-558.
    Listed reading
  • Perleman, Leslie, and Edward Barrett. The Mayfield Handbook of Technical & Scientific Writing . New York, NY: McGraw Hill, 1997. ISBN: 9781559346474.
    Listed reading

Prerequisites & course information

Same subject as 6.2600J Prereq: Calculus II (GIR) , Chemistry (GIR) , Physics II (GIR) , or permission of instructor U (Spring) 3-4-5 units

Sources