Materials Processing for Micro- and Nano-Systems

3-0-9 units · Graduate

Processing of bulk, thin film, and nanoscale materials for applications in electronic, magnetic, electromechanical, and photonic devices and microsystems. Topics include growth of bulk, thin-film, nanoscale single crystals via vapor and liquid phase processes; formation, patterning and processing of thin films, with an emphasis on relationships among processing, structure, and properties; and processing of systems of nanoscale materials. Examples from materials processing for applications in high-performance integrated electronic circuits, micro-/nano-electromechanical devices and systems and integrated sensors.