Design and Fabrication of Microelectromechanical Devices

Senturia, Stephen D. Microsystem Design . New York, NY: Springer, 2004. ISBN: 9780792372462.

Madou, Marc. Fundamentals of Microfabrication . Boca Raton, FL: CRC Press, 1998. ISBN: 9780849394515. The 2002 edition is also fine.

Kovacs, Gregory T. A. Micromachined Transducers Sourcebook . New York, NY: McGraw-Hill, 1998. ISBN: 9780072907223.

Maluf, Nadim. An Introduction to Microelectromechanical Systems Engineering . Boston, MA: Artech House, 1999. ISBN: 9780890065815.

Nathan, Arokia, and Henry Baltes. Microtransducer CAD: Physical and Computational Aspects . New York, NY: Springer, 1999. ISBN: 9783211831038.

Romanowicz, Bartlomiej. Methodology for the Modeling and Simulation of Microsystems . New York, NY: Springer, 1997. ISBN: 9780792383062.

Tabib-Azar, Masood. Microactuators . Norwell, MA: Kluwer Academic, 1997. ISBN: 9780792380894.

Gardner, Julian W. Microsensors: Principles and Applications . New York, NY: John Wiley and Sons, 1994. ISBN: 9780471941361.

Ristic, Ljubisa, ed. Sensor Technology and Devices . Boston, MA: Artech House, 1994. ISBN: 9780890065327.

Ballantine, D. S, Jr., et al. Acoustic Wave Sensors: Theory, Design, and Physico-Chemical Applications . Burlington, MA: Academic Press, 1996. ISBN: 9780120774609.

De Los Santos, Hector J. Introduction to Microelectromechanical (MEM) Microwave Systems . Boston, MA: Artech House, 1999. ISBN: 9780890062821.

Gere, James M., and Stephen P. Timoshenko. Mechanics of Materials . 2nd ed. Pacific Grove, CA: Brooks/Cole, 1984. ISBN: 9788123908946.

A more recent edition: Gere, James, and Barry Goodno. Mechanics of Materials . Florence, KY: Cengage-Engineering, 2008. ISBN: 9780534553975.

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication . 2nd ed. New York, NY: Oxford University Press, 2001. ISBN: 9780195136050.

Muller, Richard S., Roger T. Howe, and Stephen D. Senturia, eds. Microsensors . New York, NY: IEEE Press, 1991. ISBN: 9780879422455.

Trimmer, William, ed. Micromechanics and MEMS . New York, NY: Wiley-IEEE Press, 1997. ISBN: 9780780310858.

Transducers ‘XX (International Conference on Solid-State Sensors and Actuators), odd-numbered years since 1983, proceedings available from IEEE (US Meetings), Elsevier (European Meetings), IEE Japan (Japanese Meetings).

MEMS ‘XX (IEEE Workshop on Micro Electro Mechanical Systems), annual since 1989.

Eurosensors ‘XX, annual since 1987, proceedings published in special issues of Sensors and Actuators.

Solid-State Sensors and Actuators Workshop, Hilton Head, SC, even-numbered years since 1984, proceedings available from Transducer Research Foundation.

Japanese Sensor Symposium, annual since 1982; technical digest published in English by the Institute of Electrical Engineers of Japan (IEE).

All readings presented in the table below refer to the required textbook:

Senturia, Stephen D. Microsystem Design . New York, NY: Springer, 2004. ISBN: 9780792372462.

LEC #: 1 · TOPICS: Introduction to MEMS; microfabrication for MEMS: part I · READINGS: Chapters 1 and 2

LEC #: 2 · TOPICS: Microfabrication for MEMS: part II · READINGS: Chapters 3 and 4

LEC #: 3 · TOPICS: Microfabrication for MEMS: part III · READINGS: Chapters 3 and 4

LEC #: 4 · TOPICS: Microfabrication for MEMS: part IV; in-class fab problem · READINGS: Chapters 3 and 5

LEC #: 6 · TOPICS: Elasticity or electronics I · READINGS: Chapters 8 and 14

LEC #: 7 · TOPICS: Structures or electronics II · READINGS: Chapters 9 and 14

LEC #: 8 · TOPICS: Lumped-element modeling · READINGS: Chapter 5

LEC #: 9 · TOPICS: Energy-conserving transducers · READINGS: Chapter 6

LEC #: 10 · TOPICS: Dynamics, especially nonlinear · READINGS: Chapter 7

LEC #: 11 · TOPICS: Structures special topics · READINGS: Chapter 10

LEC #: 12 · TOPICS: Thermal energy domain; dissipation · READINGS: Chapter 11

LEC #: 13 · TOPICS: Modeling dissipative processes · READINGS: Chapter 12

LEC #: 14 · TOPICS: Fluids 1 · READINGS: Chapter 13

LEC #: 15 · TOPICS: Fluids 2 · READINGS: Chapter 13

LEC #: 16 · TOPICS: Transport · READINGS: Chapter 13

LEC #: 17 · TOPICS: Feedback · READINGS: Chapter 15

LEC #: 18 · TOPICS: Noise · READINGS: Chapter 16

LEC #: 19 · TOPICS: Packaging · READINGS: Chapter 17

LEC #: 23 · TOPICS: Optical MEMS case study · READINGS: Chapter 20

LEC #: 24 · TOPICS: Capacitive accelerometer case study · READINGS: Chapter 19

LEC #: 25 · TOPICS: BioMEMS case study · READINGS: Chapter 22