ECE 7531
Epitaxial Heterostructures
Science and techniques behind thin film growth and engineering for combining different materials, altering chemical composition at the nanometer scale, while controlling defects and strain. Epitaxial crystal growth will be explained. Students will gain an understanding of the kinetics, thermodynamics, and technology involved in epitaxial heterostructures and self-assembled nanostructures. Prereq: Grad standing. Not open to students with credit for MSE 7531. Cross-listed in MSE.
Sources
- Course catalogue ↗Current public catalogue; retrieved 2026-11-05