Introduction to Micro- and Nano-electromechanical Technologies

1 Course Unit

Introduction to MEMS and NEMS technologies: MEMS/NEMS applications and key commercial success stories (accelerometers, gyroscopes, digital light projectors, resonators). Review of micromachining techniques and MEMS/NEMS fabrication approaches. Actuation methods in MEMS and NEMS, MEMS/NEMS design and modeling. Examples of MEMS/NEMS components from industry and academia. Case studies: MEMS inertial sensors, microscale mirrors, micro and nano resonators, micro and nano switches, MEMS/NEMS chem/bio sensors, MEMS gyroscopes, MEMS microphones. Spring Also Offered As: ESE 5290 1 Course Unit