Microfabrication Technologies

3 credits

Micro-electro-mechanical systems; Microfluidics; Photolithography; Etching; Laser ablation; Focused ion beam etching, E-beam lithography; Dry etching, Chemical vapor deposition, Physical vapor deposition; Functional polymers and composites for microfabrication; Soft lithography techniques such as micro-contact printing, replica molding, micro-molding, etc. Packaging of MEMS devices. Cleanroom technologies.