ECE 488
Microfabrication Engineering
Introduction to modern microfabrication processes and engineering, including the design and fabrication of integrated circuit chips. Topics include design, lithography, thin film deposition, etching, characterization, and packaging. MOSFET transistors will be fabricated and characterized in the laboratory setting.
Topics
- design
- lithography
- thin film deposition
- etching
- characterization
- and packaging
Topics explicitly listed in official catalogue description
Sources
- Course catalogue ↗2026-2027
Catalogue variants
- Microfabrication Engineering · 4.0