New Methods in Thin Film Synthesis

3 credits · Graduate

Materials base for engineering new classes of coatings and devices. Techniques to grow thin films at atomic scale and to fabricate multilayers/superlattices at nanoscale. Vacuum growth techniques including evaporation, molecular beam epitaxy (MBE), sputtering, ion beam assisted deposition, laser ablation, chemical vapor deposition (CVD), and electroplating. Future direction of material synthesis such as nanocluster deposition and nanoparticles self-assembly. Relationships between deposition parameters and film properties. Applications of thin film synthesis in microelectronics, nanotechnology, and biology. SCPD offering.