ENGR_O 506
Microelectromechanical Systems
Mechanisms, design, fabrication, and testing of microsensors, actuators, and MicroElectroMechanical systems (MEMS).
Sources
- Course catalogue ↗2026-2027
Mechanisms, design, fabrication, and testing of microsensors, actuators, and MicroElectroMechanical systems (MEMS).