Introduction to Microelectromechanical Systems

3 credits

Fundamentals of MEMS (MicroElectroMechanical Systems). Microfabrication of MEMS with solid-state technology. LIGA and micro injection molding. Physics of MEMS. Operational principles of various MEMS devices. [2-3--0]. Prerequisite: One of MECH_V 224, ELEC_V 204 and all of MECH_V 360, MECH_V 368. This course is not eligible for Credit/D/Fail grading.