— Integrated Circuits Fabrication

Prerequisites & course information

Course Description: Theoretical and experimental study of basic fabrication processes for metal oxide semiconductor integrated circuits, including oxidation, photolithography, impurity diffusion, metallization, wet chemical etching, and characterization. Learning Activities: Lecture 2 hour(s), Laboratory 4 hour(s). Grade Mode: Letter. General Education: Science & Engineering (SE). Learning Activities: Lecture 2 hour(s), Laboratory 4 hour(s). Grade Mode: Letter. General Education: Science & Engineering (SE).