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MAE 229

— Design & Analysis of Micro-Electromechanical Systems

(4 units)

Mechanical design of micro-electronmechanical systems (MEMS). Device modeling: lumped parameter models; energy methods; nonlinearities; electrical and mechanical noise sources. Actuation and measurement methods: capacitive, piezoresistive, thermal, piezoelectric, and optical techniques. Review of basic electronics: bridge circuits, amplitude modulation; lock-in detection.

Prerequisites & course information

Course Description: Mechanical design of micro-electronmechanical systems (MEMS). Device modeling: lumped parameter models; energy methods; nonlinearities; electrical and mechanical noise sources. Actuation and measurement methods: capacitive, piezoresistive, thermal, piezoelectric, and optical techniques. Review of basic electronics: bridge circuits, amplitude modulation; lock-in detection. Learning Activities: Lecture 4 hour(s). Grade Mode: Letter. Learning Activities: Lecture 4 hour(s). Grade Mode: Letter.

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