Introduction to Nanofabrication

Undergraduate / Graduate

This course will cover the fundamentals of nanofabrication from a practical viewpoint and will be useful for students planning to pursue research involving semiconductor processing technology, as well as broader topics such as microelectromechanical systems (MEMS), quantum devices, optoelectronics, and microfluidics. This course will cover the theory and practice of lithographic patterning; physical and chemical vapor deposition; reactive plasma etching; wet chemical processing; characterization techniques; and other special topics related to state-of-the-art processes used in the research and development of nanoscale devices. A solid grounding in introductory chemistry and physics is expected.