BME 142

Microfabrication

4 Units.

Essentials of photolithography, soft-lithography, microfabrication, Microelectromechanical Systems (MEMS), BioMEMS; applications in biomedical engineering.

Prerequisites & course information

Essentials of photolithography, soft-lithography, microfabrication, Microelectromechanical Systems (MEMS), BioMEMS; applications in biomedical engineering.

Sources

Course catalogue ↗2026-2027