EECS 179
Microelectromechanical Systems (MEMS)
Small-scale machines, small-scale phenomena, MEMS fabrication, MEMS CAD tools, MEMS devices and packaging, MEMS testing.
Prerequisites & course information
Small-scale machines, small-scale phenomena, MEMS fabrication, MEMS CAD tools, MEMS devices and packaging, MEMS testing.
Sources
- Course catalogue ↗2026-2027