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ENGRMAE 153

Advanced BIOMEMS Manufacturing Techniques

4 Units.

Introduction to BIOMEMS. Advanced biotechnology/biomedicine equipment based on MEMS and NEMS. Fundamentals of MEMS/NEMS sensing techniques and the biological and physics principles involved and the preferred MEMS and NEMS manufacturing techniques.

Prerequisites & course information

Introduction to BIOMEMS. Advanced biotechnology/biomedicine equipment based on MEMS and NEMS. Fundamentals of MEMS/NEMS sensing techniques and the biological and physics principles involved and the preferred MEMS and NEMS manufacturing techniques.

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