Integrated Circuits Fabrication Processes

4 units · Graduate courses (200-299)

Lecture, four hours; discussion, one hour; outside study, seven hours. Requisite: course 2. Principles of integrated circuits fabrication processes. Technological limitations of integrated circuits design. Topics include bulk crystal and epitaxial growth, thermal oxidation, diffusion, ion-implantation, chemical vapor deposition, dry etching, lithography, and metallization. Introduction of advanced process simulation tools. Letter grading.