Materials Science of Thin Films

4 units · Graduate courses (200-299)

Lecture, four hours; discussion, one hour; outside study, seven hours. Requisites: courses 120, 131. Fabrication, structure, and property correlations of thin films used in microelectronics for data and information processing. Topics include film deposition, interfacial properties, stress and strain, electromigration, phase changes and kinetics, reliability. Letter grading.