Deposition Technologies and Their Applications

4 units · Graduate courses (200-299)

Lecture, four hours; discussion, one hour; outside study, seven hours. Examination of physics behind majority of modern thin film deposition technologies based on vapor phase transport. Basic vacuum technology and gas kinetics. Deposition methods used in high-technology applications. Theory and experimental details of physical vapor deposition (PVD), chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition processes. Letter grading.